Chlorine trifluoride

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Chlorine trifluoride is an interhalogen compound with the formula ClF3. It is a colorless, poisonous, corrosive, and extremely reactive gas that condenses to a pale, greenish-yellow liquid, the form in which it is most often sold (pressurized at room temperature). It is notable for its extreme oxidation properties. The compound is primarily of interest in plasmaless cleaning and etching operations in the semiconductor industry, in nuclear reactor fuel processing, historically as a rocket oxidizer, and various other industrial operations owing to its corrosive nature.

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